Cameras In Action - Jaeyoung Im: Dhyana 4040 - X-ray Semiconductor Ima

Dhyana 4040BSI – Korea Advanced Institute of Science and Technology (KAIST)

Cameras in Action - X-ray Semiconductor Imaging @ KAIST

"The Dhyana 4040 gives us a large field of view, a high frame rate, high QE for sensitive detection, and lots of pixels for large data collection. The camera is very easy to use."

– Jaeyoung Im, Korea Advanced Institute of Science and Technology (KAIST)

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Research Aims

Jaeyoung Im is developing faster X-ray imaging methods to improve the inspection of semiconductor devices. As electronic components become increasingly complex, manufacturers need ways to examine small internal features and identify potential defects without damaging the device. His work aims to combine the detail needed to see these structures with the speed and field of view required to inspect larger areas efficiently.

The approach uses a scintillator, a material that converts X-rays into light that a scientific camera can detect. By capturing images from an inclined X-ray beam and combining information from multiple views, the team is developing methods to examine structures within a sample. A longer-term aim is to increase imaging speeds towards thousands of frames per second, supporting faster inspection as the system develops.

Group Website

Jaeyoung Im KAIST Scintillator Setup Schematic from November 2025 paper

Equipment & Experiment

The imaging system combines an X-ray source with a scintillator and a Tucsen Dhyana 4040BSI. X-rays passing through the sample are converted into light by the scintillator; the camera then records that light to produce images of the sample’s internal structure.

The system directs the X-ray beam towards the sample at an inclined angle, and uses stepping movements during acquisition to collect images from different positions. These images can then be combined to examine the sample’s internal features. For semiconductor inspection, the team is interested in resolving features around 1 µm and potentially smaller. Objective lenses can be used to magnify the scintillator image, reducing the effective pixel size at the sample.

The Dhyana 4040BSI provides a large number of pixels and a high frame rate, allowing the team to capture detailed images over a wide area. Its high quantum efficiency also helps the camera detect the light produced by the scintillator. Jaeyoung Im controls the camera through LabVIEW, which works well with his existing setup.

The team is currently modifying the system, with the longer-term aim of increasing acquisition speeds towards thousands of frames per second. This would support faster collection of the images needed for inspection.

Experience with Tucsen

“Support from Tucsen has been very good. We have had no problems with the camera and it is very easy to use. We use LabView and other third-party software and it works great in this."